Product list
Pellet-type Material
Easy-to-use, pellet-type materials of various shapes are available, allowing for choosing the one best suited to your hearth liner. Also available are pellets of high thermal shock resistance material that can tolerate the high energy from an electron gun or other energy source.

Granule-type Materials
Granule types let you add evaporation materials as needed, so they are suited for continuous evaporation. We also provide low gas granules that emit only a low level of gas, preventing adverse effects on the strength and durability of the film.

Functional Materials
Functional materials are evaporation materials, which are used to fabricate organic thin films having special functions such as water repellency, antifouling property or other non-optical properties. Unlike the conventional coating method using a solvent, it is possible to proceed to the water repellent or antifouling processing stage just after the anti-reflection coating process because the coating is done by vacuum evaporation.
Evaporation Material Products
Refractive index※1 | Product name | Main compound | Pellet※2 | Granule※3 | Evaporation source | Stress※5 | Remarks | ||
---|---|---|---|---|---|---|---|---|---|
EB | RH | ||||||||
Materials for optical films | 1.33 | Chiolite | Na5Al3F14 | ○ | ○ | ○ | Mo,Ta | - | |
1.35 | Cryolite | Na3AlF6 | - | ○ | ○ | Mo,Ta | T | ||
1.36 | AlF3 | AlF3 | - | ○ | × | Mo,Ta,W | T | ||
1.38 | MgF2 | MgF2 | ○ | ○ | △ | Mo,Ta | T | ||
1.43 | CaF2 | CaF2 | - | ○ | △ | Mo,Ta,W | T | ||
1.47 | SiO2 | SiO2 | ○ | ○ | ○ | - | C | ||
1.48 | BaF2 | BaF2 | - | ○ | ○ | Mo,Ta,W | - | Transparent in the infrared region | |
1.48 | S4F | SiO2+Al2O3 | - | ○ | ○ | × | C | ||
1.48 | S5F | SiO2+Al2O3 | ○ | ○ | ○ | × | C | ||
1.52 | YF3 | YF3 | - | ○ | ○ | × | - | ||
1.59 | LaF3 | LaF3 | - | ○ | × | Mo,Ta | T(Thin film)/C(Thick film) | ||
1.60 | CeF3 | CeF3 | - | ○ | × | Mo,Ta,W | T | ||
1.60 | NdF3 | NdF3 | - | ○ | × | Mo,Ta | - | ||
1.64 | Al2O3 | Al2O3 | ○ | ○ | ○ | × | T | Stabilized by the inclusion of oxygen | |
1.69 | OM-4 | ZrO2+Al2O3 | ○ | - | ○ | × | T | ||
1.7-2.0 | SiO | SiO | ○ | ○ | △ | Mo,Ta | T | ||
1.7-2.0 | LUMILEAD SiO | SiO | - | ○ | △ | Mo,Ta | T | Product of the low splash generation | |
1.74 | MgO | MgO | - | ○ | ○ | × | C | ||
1.75 | OM-6 | ZrO2+Al2O3 | ○ | - | ○ | × | T | ||
1.81 | Y2O3 | Y2O3 | ○ | ○ | ○ | × | - | ||
1.99 | I.T.O | In2O3+SnO2 | ○ | ○ | ○ | Ta,W | C | Transparent conductive film | |
2.00 | OH-14 | La2Ti2O7 | - | ○ | ○ | × | T | ||
2.00 | Nb2O5 | Nb2O5 | - | ○ | ○ | × | T/C(IAD) | ||
2.00 | Degassed Nb2O5 | Nb2O5 | - | ○ | ○ | × | T/C(IAD) | Requires the inclusion of oxygen | |
2.05 | OA-100 | Ta2O5 | - | ○ | ○ | × | T | Requires the inclusion of oxygen | |
2.06 | HfO2 | HfO2 | ○ | ○ | ○ | × | T | Transparent in the ultraviolet region | |
2.07 | ZrO2 | ZrO2 | ○ | ○ | ○ | × | T/C(200℃) | ||
2.10 | ZrO2+Ta2O5 | ZrO2+Ta2O5 | ○ | - | ○ | × | - | ||
2.13 | CeO2 | CeO2 | ○ | ○ | ○ | W | C | Absorbs ultraviolet rays | |
2.14 | WO3 | WO3 | ○ | - | ○ | W | - | ||
2.15 | OH-2 | ZrO2+TiO2 | ○ | - | ○ | × | T | ||
2.16 | OH-6 | ZrO2+TiO2 | ○ | - | ○ | × | T | ||
2.18 | OH-5 | ZrO2+TiO2 | ○ | - | ○ | × | T | ||
2.2 | Ta2O5 | Ta2O5 | - | ○ | ○ | × | T | ||
2.22 | OA-500 | Ta2O5+ZrO2 | - | ○ | ○ | × | - | ||
2.24 | OA-600 | Ta2O5+TiO2 | - | ○ | ○ | × | - | ||
2.30 | ZnS | ZnS | ○ | ○ | ○ | Mo,Ta | C | ||
2.30 | OS-30 | Ti3O5 | ○ | - | ○ | W | T | Requires the inclusion of oxygen | |
2.31 | OS-50 | Ti3O5 | - | ○ | ○ | W | T | Requires the inclusion of oxygen | |
2.33 | OS-10 | Ti4O7 | - | ○ | ○ | W | T | Requires the inclusion of oxygen | |
2.33 | Ti2O3 | Ti2O3 | - | ○ | ○ | W | T | Requires the inclusion of oxygen | |
2.35 | TiO | TiO | - | ○ | ○ | W | T | Requires the inclusion of oxygen | |
2.35 | TiO2 | TiO2 | - | ○ | ○ | × | T | ||
Materials for metal films or other purposes | - | Ag | Ag | - | ○ | △ | Mo,Ta | - | |
- | Al | Al | ○ | - | △ | W | - | Mainly wire-shaped | |
- | Au | Au | - | ○ | △ | W | - | ||
- | Cr | Cr | - | ○ | - | W | - | ||
- | Ni | Ni | - | ○ | △ | W | - | ||
Materials for functional films | 1.34 | SURFCLEAR300 | Oil-repellent | ○ | - | △ | Mo,Ta,W | - | Organic material |
1.33 | SURFCLEAR100 | Oil-repellent | ○ | - | △ | Mo,Ta,W | - | Organic material | |
1.35 | OF-SR | Oil-repellent | ○ | - | △ | Mo,Ta,W | - | Organic material | |
1.55 | PHILICFINE HP-1 | Hydrophilic | - | ○ | ○ | × | - | *Please use Mo,W Hearth | |
1.65 | PHILICFINE HP-2 | Hydrophilic | - | ○ | ○ | × | - | *Please use Mo,W Hearth | |
1.81 | PHILICFINE HP-3 | Hydrophilic | - | ○ | ○ | × | - | *Please use Mo,W Hearth | |
2.54 ※4 | LUMILEAD TNO | Ti3O5 | - | ○ | ○ | × | T | Antistatic performance |
※1) Measured at wavelength of 500 nm, all for reference purposes
※2) ※3) Indicates the difference in shape
※4) The values are those measured at a wavelength of 550 mm using the spectroscopic ellipsometer
(refractive index of OS-50 in the same measuring conditions: 2.56)
※5)T:Tension、C:Compression
In the case of export, please comply with the laws of the exporting and the importing country.