Product list

List of vapor deposition materials

Category 　 　 　
　 　
Refractive index ～
Shape 　
Evaporation source 　 　 　
  • * Please refer to the following for a list of products by shape and size.
Optical film materials Functional materials
　
　　 Refractive index※1 Product name Main compound Pellet※2 Granule※3 Evaporation source Stress※5 Remarks
EB RH
Optical film materials 1.33 Chiolite Na5Al3F14 ○ ○ ○ Mo,Ta - 　
Optical film materials 1.35 Cryolite Na3AlF6 - ○ ○ Mo,Ta T 　
Optical film materials 1.36 AlF3 AlF3 - ○ × Mo,Ta,W T 　
Optical film materials 1.38 MgF2 MgF2 ○ ○ △ Mo,Ta T 　
Optical film materials 1.43 CaF2 CaF2 - ○ △ Mo,Ta,W T 　
Optical film materials 1.47 SiO2 SiO2 ○ ○ ○ - C 　
Optical film materials 1.48 BaF2 BaF2 - ○ ○ Mo,Ta,W - Transparent in the infrared region
Optical film materials 1.48 S4F SiO2+Al2O3 - ○ ○ × C 　
Optical film materials 1.48 S5F SiO2+Al2O3 ○ ○ ○ × C 　
Optical film materials 1.52 YF3 YF3 - ○ ○ × - 　
Optical film materials 1.59 LaF3 LaF3 - ○ × Mo,Ta T(Thin film)/C(Thick film) 　
Optical film materials 1.60 CeF3 CeF3 - ○ × Mo,Ta,W T 　
Optical film materials 1.60 NdF3 NdF3 - ○ × Mo,Ta - 　
Optical film materials 1.64 Al2O3 Al2O3 ○ ○ ○ × T Stabilized by the inclusion of oxygen
Optical film materials 1.69 OM-4 ZrO2+Al2O3 ○ - ○ × T 　
Optical film materials 1.7-2.0 SiO SiO ○ ○ △ Mo,Ta T 　
Optical film materials 1.7-2.0 　LUMILEAD　SiO SiO - ○ △ Mo,Ta T Product of the low splash generation
Optical film materials 1.74 MgO MgO - ○ ○ × C 　
Optical film materials 1.75 OM-6 ZrO2+Al2O3 ○ - ○ × T 　
Optical film materials 1.81 Y2O3 Y2O3 ○ ○ ○ × - 　
Optical film materials 2.00 OH-14 La2Ti2O7 - ○ ○ × T 　
Optical film materials 2.00 Nb2O5 Nb2O5 - ○ ○ × T/C(IAD) 　
Optical film materials 2.00 Degassed Nb2O5 Nb2O5 - ○ ○ × T/C(IAD) Requires the inclusion of oxygen
Optical film materials 2.05 OA-100 Ta2O5 - ○ ○ × T Requires the inclusion of oxygen
Optical film materials 2.06 HfO2 HfO2 ○ ○ ○ × T Transparent in the ultraviolet region
Optical film materials 2.07 ZrO2 ZrO2 ○ ○ ○ × T/C(200℃) 　
Optical film materials 2.10 ZrO2+Ta2O5 ZrO2+Ta2O5 ○ - ○ × - 　
Optical film materials 2.13 CeO2 CeO2 ○ ○ ○ W C Absorbs ultraviolet rays
Optical film materials 2.14 WO3 WO3 ○ - ○ W - 　
Optical film materials 2.15 OH-2 ZrO2+TiO2 ○ - ○ × T 　
Optical film materials 2.16 OH-6 ZrO2+TiO2 ○ - ○ × T 　
Optical film materials 2.18 OH-5 ZrO2+TiO2 ○ - ○ × T 　
Optical film materials 2.20 Ta2O5 Ta2O5 - ○ ○ × T 　
Optical film materials 2.22 OA-500 Ta2O5+ZrO2 - ○ ○ × - 　
Optical film materials 2.24 OA-600 Ta2O5+TiO2 - ○ ○ × - 　
Optical film materials 2.30 ZnS ZnS ○ ○ ○ Mo,Ta C 　
Optical film materials 2.30 OS-30 Ti3O5 ○ - ○ W T Requires the inclusion of oxygen
Optical film materials 2.31 OS-50 Ti3O5 - ○ ○ W T Requires the inclusion of oxygen
Optical film materials 2.33 OS-10 Ti4O7 - ○ ○ W T Requires the inclusion of oxygen
Optical film materials 2.33 Ti2O3 Ti2O3 - ○ ○ W T Requires the inclusion of oxygen
Optical film materials 2.35 TiO TiO - ○ ○ W T Requires the inclusion of oxygen
Optical film materials 2.35 TiO2 TiO2 - ○ ○ × T 　
Metallic film materials - Ag Ag - ○ △ Mo,Ta - 　
Metallic film materials - Al Al ○ - △ W - Mainly wire-shaped
Metallic film materials - Au Au - ○ △ W - 　
Metallic film materials - Cｒ Cｒ - ○ × W - 　
Metallic film materials - Ni Ni - ○ △ W - 　
Water-repellent film materials
Oil-repellent film materials		 1.34 SURFCLEAR300 Organic material ○ - △ Mo,Ta,W - Organic material
Water-repellent film materials
Oil-repellent film materials		 1.33 SURFCLEAR100 Organic material ○ - △ Mo,Ta,W - Organic material
Water-repellent film materials
Oil-repellent film materials		 1.35 OF-SR Organic material ○ - △ Mo,Ta,W - Organic material
Water-repellent film materials
Oil-repellent film materials		 1.33 OR-510 Organic material ○ - △ Mo,Ta,W - Organic material
Hydrophilic film materials 1.55 PHILICFINE HP-1 Ca5 (PO4)3 (OH) - ○ ○ × - *Please use Mo,W Hearth
Hydrophilic film materials 1.65 PHILICFINE HP-2 Ca5 (PO4)3 (OH) - ○ ○ × - *Please use Mo,W Hearth
Hydrophilic film materials 1.81 PHILICFINE HP-3 Ca5 (PO4)3 (OH) - ○ ○ × - *Please use Mo,W Hearth
Transparent conductive film materials
Antistatic film material		 1.99 I.T.O In2O3+SnO2 ○ ○ ○ Ta,W C Transparent conductive film
Antistatic film material 2.54 ※4 LUMILEAD　TNO Ti3O5 - ○ ○ × T Antistatic performance

※1) Measured at wavelength of 500 nm, all for reference purposes
※2) ※3) Indicates the difference in shape
※4) The values are those measured at a wavelength of 550 mm using the spectroscopic ellipsometer (refractive index of OS-50 in the same measuring conditions: 2.56)
※5）T:Tension、C:Compression
In the case of export, please comply with the laws of the exporting and the importing country.

Pellet-type Material

Easy-to-use, pellet-type materials of various shapes are available, allowing for choosing the one best suited to your hearth liner. Also available are pellets of high thermal shock resistance material that can tolerate the high energy from an electron gun or other energy source.

Pellet-type Material

Granule-type Materials

Granule types let you add evaporation materials as needed, so they are suited for continuous evaporation. We also provide low gas granules that emit only a low level of gas, preventing adverse effects on the strength and durability of the film.

Pellet-type Material

Functional Materials

Functional materials are evaporation materials, which are used to fabricate organic thin films having special functions such as water repellency, antifouling property or other non-optical properties. Unlike the conventional coating method using a solvent, it is possible to proceed to the water repellent or antifouling processing stage just after the anti-reflection coating process because the coating is done by vacuum evaporation.