Product list

Pellet-type Material

Easy-to-use, pellet-type materials of various shapes are available, allowing for choosing the one best suited to your hearth liner. Also available are pellets of high thermal shock resistance material that can tolerate the high energy from an electron gun or other energy source.

Pellet-type Material

Granule-type Materials

Granule types let you add evaporation materials as needed, so they are suited for continuous evaporation. We also provide low gas granules that emit only a low level of gas, preventing adverse effects on the strength and durability of the film.

Pellet-type Material

Functional Materials

Functional materials are evaporation materials, which are used to fabricate organic thin films having special functions such as water repellency, antifouling property or other non-optical properties. Unlike the conventional coating method using a solvent, it is possible to proceed to the water repellent or antifouling processing stage just after the anti-reflection coating process because the coating is done by vacuum evaporation.

Evaporation Material Products

　　 Refractive index※1 Product name Main compound Pellet※2 Granule※3 Evaporation source Stress※5 Remarks
EB RH
Materials for optical films 1.33 Chiolite Na5Al3F14 ○ ○ ○ Mo,Ta - 　
1.35 Cryolite Na3AlF6 - ○ ○ Mo,Ta T 　
1.36 AlF3 AlF3 - ○ × Mo,Ta,W T 　
1.38 MgF2 MgF2 ○ ○ △ Mo,Ta T 　
1.43 CaF2 CaF2 - ○ △ Mo,Ta,W T 　
1.47 SiO2 SiO2 ○ ○ ○ - C 　
1.48 BaF2 BaF2 - ○ ○ Mo,Ta,W - Transparent in the infrared region
1.48 S4F SiO2+Al2O3 - ○ ○ × C 　
1.48 S5F SiO2+Al2O3 ○ ○ ○ × C 　
1.52 YF3 YF3 - ○ ○ × - 　
1.59 LaF3 LaF3 - ○ × Mo,Ta T(Thin film)/C(Thick film) 　
1.60 CeF3 CeF3 - ○ × Mo,Ta,W T 　
1.60 NdF3 NdF3 - ○ × Mo,Ta - 　
1.64 Al2O3 Al2O3 ○ ○ ○ × T Stabilized by the inclusion of oxygen
1.69 OM-4 ZrO2+Al2O3 ○ - ○ × T 　
1.7-2.0 SiO SiO ○ ○ △ Mo,Ta T 　
1.7-2.0 　LUMILEAD　SiO SiO - ○ △ Mo,Ta T Product of the low splash generation
1.74 MgO MgO - ○ ○ × C 　
1.75 OM-6 ZrO2+Al2O3 ○ - ○ × T 　
1.81 Y2O3 Y2O3 ○ ○ ○ × - 　
1.99 I.T.O In2O3+SnO2 ○ ○ ○ Ta,W C Transparent conductive film
2.00 OH-14 La2Ti2O7 - ○ ○ × T 　
2.00 Nb2O5 Nb2O5 - ○ ○ × T/C(IAD) 　
2.00 Degassed Nb2O5 Nb2O5 - ○ ○ × T/C(IAD) Requires the inclusion of oxygen
2.05 OA-100 Ta2O5 - ○ ○ × T Requires the inclusion of oxygen
2.06 HfO2 HfO2 ○ ○ ○ × T Transparent in the ultraviolet region
2.07 ZrO2 ZrO2 ○ ○ ○ × T/C(200℃) 　
2.10 ZrO2+Ta2O5 ZrO2+Ta2O5 ○ - ○ × - 　
2.13 CeO2 CeO2 ○ ○ ○ W C Absorbs ultraviolet rays
2.14 WO3 WO3 ○ - ○ W - 　
2.15 OH-2 ZrO2+TiO2 ○ - ○ × T 　
2.16 OH-6 ZrO2+TiO2 ○ - ○ × T 　
2.18 OH-5 ZrO2+TiO2 ○ - ○ × T 　
2.2 Ta2O5 Ta2O5 - ○ ○ × T 　
2.22 OA-500 Ta2O5+ZrO2 - ○ ○ × - 　
2.24 OA-600 Ta2O5+TiO2 - ○ ○ × - 　
2.30 ZnS ZnS ○ ○ ○ Mo,Ta C 　
2.30 OS-30 Ti3O5 ○ - ○ W T Requires the inclusion of oxygen
2.31 OS-50 Ti3O5 - ○ ○ W T Requires the inclusion of oxygen
2.33 OS-10 Ti4O7 - ○ ○ W T Requires the inclusion of oxygen
2.33 Ti2O3 Ti2O3 - ○ ○ W T Requires the inclusion of oxygen
2.35 TiO TiO - ○ ○ W T Requires the inclusion of oxygen
2.35 TiO2 TiO2 - ○ ○ × T 　
Materials for metal films or other purposes - Ag Ag - ○ △ Mo,Ta - 　
- Al Al ○ - △ W - Mainly wire-shaped
- Au Au - ○ △ W - 　
- Cｒ Cｒ - ○ - W - 　
- Ni Ni - ○ △ W - 　
Materials for functional films 1.34 SURFCLEAR300 Oil-repellent ○ - △ Mo,Ta,W - Organic material
1.33 SURFCLEAR100 Oil-repellent ○ - △ Mo,Ta,W - Organic material
1.35 OF-SR Oil-repellent ○ - △ Mo,Ta,W - Organic material
1.55 PHILICFINE HP-1 Hydrophilic - ○ ○ × - *Please use Mo,W Hearth
1.65 PHILICFINE HP-2 Hydrophilic - ○ ○ × - *Please use Mo,W Hearth
1.81 PHILICFINE HP-3 Hydrophilic - ○ ○ × - *Please use Mo,W Hearth
2.54 ※4 LUMILEAD　TNO Ti3O5 - ○ ○ × T Antistatic performance

※1) Measured at wavelength of 500 nm, all for reference purposes
※2) ※3) Indicates the difference in shape
※4) The values are those measured at a wavelength of 550 mm using the spectroscopic ellipsometer (refractive index of OS-50 in the same measuring conditions: 2.56)
※5）T:Tension、C:Compression
In the case of export, please comply with the laws of the exporting and the importing country.